氢气与Cu中间层对GZO薄膜光电性能的影响
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film
Fig. 2 Optical transmittance spectra of GZO films deposited at room temperature in different H 2 fluxes
氢气与Cu中间层对GZO薄膜光电性能的影响 |
| 吕坤, 祝柏林, 李珂, 胡文超, 谢铭, 吴隽 |
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film |
| 图2 在室温、不同H 2 流量下制备的GZO薄膜透射光谱 Fig. 2 Optical transmittance spectra of GZO films deposited at room temperature in different H 2 fluxes |
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